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    Online Resource
    Online Resource
    MEMS Packaging Technologies and 3D Integration (2022)
    [Erscheinungsort nicht ermittelbar] : MDPI - Multidisciplinary Digital Publishing Institute
    Details
    ISBN: 9783036542584 , 9783036542577
    Language: Undetermined
    Pages: 1 Online-Ressource (210 p.)
    Keywords: Research & information: general ; Biology, life sciences
    Abstract: This Special Issue introduces recent research results on MEMS packaging and 3D integration whose subjects can be divided as follow; three papers on biocompatible implantable packaging, three papers on interconnect, three papers on bonding technologies, one paper on vacuum packaging, and three papers on modeling and simulation
    Note: English
    URL: kostenfrei
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