Online Resource
[Erscheinungsort nicht ermittelbar] : KIT Scientific Publishing
ISBN:
9783731502630
Language:
German
Pages:
1 Online-Ressource (IX, 126 p.)
Series Statement:
Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie / Hrsg.: Institut für Mikrostrukturtechnik
Abstract:
In many research areas X-rays are used for analysis. In X-ray full field microscopy a high resolution is achievable independent of the source properties by using imaging lenses. With an objective lens with 100 mm focal length a theoretical resolution of 60nm is achievable at 30 keV. In Experiments a resolution of 200 nm for a field of view of 80 µm
Note:
German
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