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  • 1
    Online Resource
    Online Resource
    Chemicals Vapour Deposition in the Semiconductor Industry (2015)
    Paris : OECD Publishing
    Details
    ISBN: 9789264502437
    Language: English
    Pages: 1 Online-Ressource (80 p.)
    Series Statement: Series on Emission Scenario Documents no.35
    Keywords: Environment
    Abstract: This OECD Emission Scenario Document (ESD) provides information on the sources, use patterns, and potential release pathways of chemicals used as chemical vapour deposition (CVD) precursors in the semiconductor industry. The document presents standard approaches for estimating environmental releases and occupational exposures, and discusses the typical engineering controls used to mitigate exposure to CVD precursors.
    DOI: 10.1787/b0957a80-en
    URL: lizenzpflichtig
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