ISBN:
9789814411073
,
9814411078
,
9789814411066
Language:
English
Pages:
1 online resource (xiii, 306 pages)
,
illustrations
Parallel Title:
Erscheint auch als
Keywords:
Microelectromechanical systems Costs
;
Microelectromechanical systems industry Costs
;
TECHNOLOGY & ENGINEERING ; Mechanical
;
Microelectromechanical systems
;
Microelectromechanical systems industry
;
Electronic books
;
Electronic books
Abstract:
This volume demonstrates show cost analysis can be adapted to MEMS, taking into account the wide range of processes and equipment, the major differences with the established semiconductor industry, and the presence of both large-scale, product-orientated manufacturers and small- and medium-scale foundries. The content examines the processes and equipment sufficiently for the reader to appreciate how costs arise.
Note:
Includes bibliographical references and index. - Online resource; title from PDF title page (CRCnetBASE, viewed Jun. 17, 2014)
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